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Spatial Resolution of Small Particles in Silane Discharge

Published online by Cambridge University Press:  21 February 2011

K. G. Spears and
R. M. Roth
K. G. Spears
Affiliation:
Northwestern University, Department of Chemistry, Evanston, IL 60201
R. M. Roth
Affiliation:
Currently at Standard Oil Company (Indiana), Amoco Research Center, P. O. Box 400 Naperville, IL 60566
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Abstract

A capacitively coupled, rf glow discharge of silane in argon was studied with laser light scattering to determine the spatial concentration of small particles. Multi-wavelength scattering profiles have been obtained and are being analyzed to obtain size distributions as a function of spatial location. Very sharply defined particle zones can be found under some plasma conditions that are spatially related to the silicon atom profiles. We will report our results and attempt to qualitatively describe how these zones relate to plasma chemistry and film deposition processes.

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References

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