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Structural Evolution of Rapid Thermal Carbonized Si Surfaces

Published online by Cambridge University Press:  21 February 2011

Volker Cimalla and
Jörg Pezoldt
Volker Cimalla
Affiliation:
TU Ilmenau, Institut für Festkörperelektronik, Postfach 327, D-98684 Ilmenau, Germany
Jörg Pezoldt
Affiliation:
TU Ilmenau, Institut für Festkörperelektronik, Postfach 327, D-98684 Ilmenau, Germany
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Abstract

The structural and morphological evolution of growing β-SiC films was investigated in dependence on the ramp rate and the propane concentration. It is shown that the film structure depends critically on the formation of an initial SiC layer during heating-up. A growth model was proposed to explain the obtained different resulting film structure.

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References

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