Hostname: page-component-7b7567c8c-tnzcf Total loading time: 0 Render date: 2026-11-15T01:58:23.186Z Has data issue: false hasContentIssue false
  • English
  • Français

Studies of c-Axis Threading Screw Dislocations in Hexagonal SiC

Published online by Cambridge University Press:  01 February 2011

Yi Chen,
Xianrong Huang,
Ning Zhang,
Govindhan Dhanaraj,
Edward Sanchez,
Michael F. MacMillan and
Michael Dudley
Yi Chen
Affiliation:
yichen1@ic.sunysb.edu, Stony Brook University, Materials Science and Engineering, 314 Old Engineering, Stony Brook University, Stony Brook, NY, 11794-2275, United States
Xianrong Huang
Affiliation:
xhuang@bnl.gov, Brookhaven National Laboratory, National Synchrotron Light Source II, Upton, NY, 11794-2275, United States
Ning Zhang
Affiliation:
nizhang@ic.sunysb.edu, Stony Brook University, Department of Materials Science and Engineering, Stony Brook, NY, 11794-2275, United States
Govindhan Dhanaraj
Affiliation:
gdhanaraj@notes.cc.sunysb.edu, Stony Brook University, Department of Materials Science and Engineering, Stony Brook, NY, 11794-2275, United States
Edward Sanchez
Affiliation:
edward.sanchez@dowcorning.com , Dow Corning Compound Semiconductor Solutions, Midland, MI, 48611, United States
Michael F. MacMillan
Affiliation:
mike.macmillan@dowcorning.com, Dow Corning Compound Semiconductor Solutions, Midland, MI, 48611, United States
Michael Dudley
Affiliation:
mdudley@notes.cc.sunysb.edu, Stony Brook University, Department of Materials Science and Engineering, Stony Brook, NY, 11794-2275, United States
Get access

Abstract

In our study, closed-core threading screw dislocations and micropipes were studied using synchrotron x-ray topography of various geometries. The Burgers vector magnitude of TSDs can be quantitatively determined from their dimensions in back-reflection x-ray topography, based on ray-tracing simulation and this has been verified by the images of elementary TSDs. Dislocation senses of closed-core threading screw dislocations and micropipes can be revealed by grazing-incidence x-ray topography. The threading screw dislocations can be converted into Frank partial dislocations on the basal planes and this has been confirmed by transmission synchrotron x-ray topography.

Keywords

dislocationsdefectscrystal growth

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1. Neudeck, P. G., Huang, W., and Dudley, M., Solid-State Electron. 42, 2157 (1998)Google Scholar
2. Chen, Y., Dudley, M., Liu, K. X. and Stahlbush, R. E., Appl. Phys. Lett. 90, 171930 (2007)Google Scholar
3. Lang, A. R. and Makepeace, A. P. W., J. Phys. D: Appl. Phys. 32, A97 (1999)Google Scholar
4. Kuhr, T. A., Sanchez, E. K., Skowronski, M., Vetter, W. M. and Dudley, M., J. Appl. Phys. 89, 4625 (2001)Google Scholar
5. Dudley, M., Huang, X. R., Huang, W., Powell, A., Wang, S., Neudeck, P. and Skowronski, M., Appl. Phys. Lett. 75, 784 (1999)Google Scholar
6. Chen, Y., Dhanaraj, G., Dudley, M., Sanchez, E. K., and MacMillan, M. F., Appl. Phys. Lett. 91, 071917 (2007)Google Scholar
7. Chen, Y. and Dudley, M., Appl. Phys. Lett. Vol. 91, 141918 (2007)Google Scholar
8. Chen, Y., Dudley, M., Sanchez, E. K. and MacMillan, M. F., J. Electron. Mater. 2007 (in press)Google Scholar
9. Tsuchida, H., Kamata, I. and Nagano, M., J. Cryst. Growth 306, 254 (2007)Google Scholar