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Three-dimensional tomography of single charge inside dielectric materials using electrostatic force microscopy

Published online by Cambridge University Press:  12 January 2012

Clement Riedel,
Richard Arinero,
Angel Alegria,
Juan Colmenero and
Juan Jose Saenz
Clement Riedel
Affiliation:
Institut d’Electronique du Sud, Université Montpellier 2, Montpellier, FranceDonostia International Physics Center, Universidad del pais vasco, San Sebastian, Spain
Richard Arinero
Affiliation:
Institut d’Electronique du Sud, Université Montpellier 2, Montpellier, France
Angel Alegria
Affiliation:
Donostia International Physics Center, Universidad del pais vasco, San Sebastian, Spain
Juan Colmenero
Affiliation:
Donostia International Physics Center, Universidad del pais vasco, San Sebastian, Spain
Juan Jose Saenz
Affiliation:
Donostia International Physics Center, Universidad del pais vasco, San Sebastian, SpainUniversidad Autonoma de Madrid, Moving Light and Electron, Madrid, Spain
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Abstract

In this contribution, we report on a numerical study demonstrating how to realize Electrostatic Force Microscopy (EFM) tomography. Based on the Equivalent Charge Method, both force and force gradient between a buried object (or trapped charges) and the Atomic Force Microscope tip are calculated. The main idea is to scan the sample at different tip sample distances and obtain the position and charge value of the object using reconstruction algorithms. The quantitative analysis here presented is a first step toward tomography for samples presenting “dilute” point charges creating non correlated signals by the interpretation of EFM signals. Lateral resolution, sensitivity (i.e. ability to detect an object), performance and limitations of EFM are also discussed in the paper.

Keywords

scanning probe microscopy (SPM)electrical propertiesnanoscale

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1421: Symposium PP – Three-Dimensional Tomography of Materials , 2012, mrsf11-1421-pp05-09
Copyright
Copyright © Materials Research Society 2012

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References

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