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X-ray Scattering from Interfaces

Published online by Cambridge University Press:  21 February 2011

E. Vlieg
Affiliation:
FOM-Institute Amolf, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
H. A. Van Der Vegt
Affiliation:
FOM-Institute Amolf, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
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Abstract

X-ray diffraction has found an increasing use in the characterization of surface structures. Due to the high penetration depth of X-rays, the technique is also very suitable for the study of buried interfaces. We will give a general outline of the technique, and then discuss two examples concerning epitaxial growth.

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Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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