During the past few years, there has been an increasing demand in thefield of precision engineering for fine motion in multi-degrees of freedomsystems. These applications motivated the development of a new robotics fieldcalled microrobotics. In this paper, we review both the design guidelines formicrorobots and the advantages of using parallel robots in very high precisionapplications. Parallel micromanipulators using elastic joints as well asstructures manufactured in single solid and metallic bellows areintroduced.