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Liquid droplet dynamics and complex morphologies in vapor–liquid–solid nanowire growth

Published online by Cambridge University Press:  05 July 2011

E.J. Schwalbach
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208
S.H. Davis
Affiliation:
Department of Engineering Sciences and Applied Mathematics, Northwestern University, Evanston, Illinois 60208
P.W. Voorhees*
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208
D. Wheeler
Affiliation:
Metallurgy Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
J.A. Warren
Affiliation:
Metallurgy Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
*
a)Address all correspondence to this author. e-mail: p-voorhees@northwestern.edu

Abstract

The morphology of semiconducting nanowires, including kinked and branched wires, must be controlled in order to produce functional devices. Here, we describe some of the experimental and theoretical work involving complex morphologies of Au-catalyzed Si nanowires grown using the vapor–liquid–solid technique. Although there is a broad parameter space to explore, experiments have highlighted the importance of the precursor and impurity partial pressures on kinking behavior. Theoretical and modeling work has indicated that the stability of and transitions in droplet configuration are important for growth direction changes that can lead to complex morphologies. We describe recent phase-field simulations of nanowire growth that address the dynamics of liquid droplets during vapor–liquid–solid growth, as well as the implications of these results for the formation of wires with complex morphology.

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Articles
Copyright
Copyright © Materials Research Society 2011
Figure 0

FIG. 1. (a) Kinked Au catalyzed Si VLS nanowires reported by Madras, Dailey and Drucker. Adapted with permission from Ref. 19, copyright 2009 American Chemical Society. (b) Simultaneous growth of small side branches off of a main Au catalyzed Si nanowire trunk as observed by Kawashima et al. Adapted with permission from Ref. 17, copyright 2008 American Chemical Society.

Figure 1

FIG. 2. Examples of the nanowire morphologies produced by Schwarz and Tersoff’s 2-D model: (a) straight, (b) kinked, and (c) crawling growth modes. Adapted with permission from Ref. 24, copyright 2011 American Chemical Society.

Figure 2

FIG. 3. Range of surface energy ratios over which stable nanowire growth is possible and schematic energy minimizing liquid configuration adapted from Roper et al.25 In regions A and B, stable nanowire growth is possible, however in region C the contact-line is predicted to unpin from the corner of the solid crystal and instead wet the sidewalls. In region B, stable growth is possible, however the annular configuration has a lower total energy and thus the droplet configuration could be metastable. The open circle27, square28 and triangle23 represent approximate values of surface energy of the Au-Si system reported in the literature, and the + is for values reported in Table I.

Figure 3

FIG. 4. Schematic of a droplet on a planar substrate. We use a cylindrically symmetric coordinate system with $\hat{r} $ and $\hat{z}$ as unit vectors in the radial and axial directions respectively. The instantaneous contact angle is θ and the contact line velocity is vCL. For a retracting droplet, vCL < 0.

Figure 4

TABLE I. Physical parameters used in simulations with reported kinetic measurements.

Figure 5

FIG. 5. Representative contours which lie within the diffuse interface region of the order parameter (black) and density field (blue) at several times during dewetting. The initial liquid droplet is ellipsoidal with major axis 30 nm in the $\hat{z}$ direction and minor axis 25 nm in $\hat{r}$ The full simulation domain is 64 × 64 nm, and horizontal black lines represents the inert substrate which is also the bottom of the simulation domain.

Figure 6

FIG. 6. Streamlines of the convective flux field $\rm\rho {{\vskip-4.5\scale50%\overrightarrow} \!\!\!\vskip4 \it v}$ in the liquid phase at the instant shown in Fig. 5(b). This plot shows 2 contours of the ρ field (blue lines), and the region between them is the diffuse liquid-vapor interface. There is strong flow from the contact line towards the top of the droplet. The flow field is radially symmetric, and for clarity only half of the droplet is shown. The full simulation domain is 64 × 64 nm.

Figure 7

FIG. 7. Maximum liquid flow speed ${\rm v}_L^{\max } $, contact-line velocity vCL magnitude, and instantaneous contact-angle θ as a function of time during dewetting and droplet formation. While this shows the magnitude of vCL, we note that the contact line is retracting and thus vCL < 0.

Figure 8

FIG. 8. Contact-angle θ as a function of contact-line velocity vCL with a fit to κ from Eq. (1). Note that vCL < 0 implies dewetting or contracting rather than spreading of the liquid phase.

Figure 9

FIG. 9. Anisotropic order parameter mobility defined in Eq. (17) used for the simulation in Fig. 10. α = 0 and α = π/2 correspond to the axial and radial directions respectively. The large change in Mϕ results in significantly faster growth of the solid phase along directions near α = π/4 compared to axial or radial growth.

Figure 10

FIG 10. Contours of ρ (blue) and ϕ (black) at 5 different times during an anisotropic solid growth. Time increases from (a) to (e) and the solid is shaded gray, liquid blue, and vapor white. The breakup of a liquid droplet into an annulus and droplet due to anisotropic solid growth occurs between (b) and (c). The droplet on top of the solid wire shrinks from (c) to (d) and eventually disappears in (e) due the difference in curvature between the top liquid droplet and annular liquid. The full simulation domain is 600 × 600 nm.