Hostname: page-component-74656f9884-54qdv Total loading time: 0 Render date: 2026-11-09T18:04:07.267Z Has data issue: false hasContentIssue false

Metal oxide memories based on thermochemical and valence change mechanisms

Published online by Cambridge University Press:  17 February 2012

J. Joshua Yang
Affiliation:
Hewlett Packard Laboratories; jianhuay@hp.com
Isao H. Inoue
Affiliation:
National Institute of Advanced Industrial Science and Technology; i.inoue@aist.go.jp
Thomas Mikolajick
Affiliation:
NaMLab gGmbH; Thomas.mikolajick@namlab.com
Cheol Seong Hwang
Affiliation:
Seoul National University; cheolsh@snu.ac.kr

Abstract

This article reviews recent progress in understanding the resistive switching (RS) behavior and improvements in device performance of RS metal oxide (MO) thin-film systems and devices. The diverse RS MO materials are classified according to their switching mechanisms and characteristics. For each category, some representative materials are selected, and their characteristics are discussed. In addition, other factors such as the device structure, which also plays a crucial role in determining the device properties, are discussed as well. When applied in a real circuit (e.g., in a crossbar structure), there are device features/characteristics that need to be considered, including the bias polarity for switching, the current-voltage relationship, reliability, and scaling issues. Since nonvolatile RS in many MO materials is primarily associated with localized conduction channels, understanding the nature and the dynamic change of the current path structure is crucial and therefore is reviewed at length here. Guidelines for the choice of materials and access devices and their fabrication methods will also be provided. Finally, this review concludes with the outlook and challenges of MO-based resistance change devices for semiconductor memories.

Information

Type
Research Article
Copyright
Copyright © Materials Research Society 2012
Figure 0

Figure 1. Classification of I-V hystereses and typical examples. Blue and red lines correspond to low and high resistance states, respectively. Arrows indicate the direction of the hystereses. Origin symmetry means the topology of the hysteresis is symmetric with respect to the origin of the I-V plane. In practical MO RS devices based on thermochemical and valence change mechanisms, I-V curves are given as that of serial and/or parallel connections of those devices with different I-V curves, and each may depend on the sweep rate. Thus, the examples are not disparate, and the patterns of I-V hystereses may be changed over the blurred boundaries by tuning the size/amount of the local current paths and connection types (serial and/or parallel). (Reprinted with permissions from References 8, 18, 23, and 24 from Elsevier, American Physical Society, Institute of Physics, and Nature Publishing Group, respectively.) Note: NDR, negative differential resistance; LRS, low resistance state; HRS, high resistance state.

Figure 1

Figure 2. Schematic diagrams depicting the conducting filament (CF) formation process. In a TiO2-based cell, (a) the oxygen vacancies (VO) produced from a cathode interface are dragged to a location where electron injection occurs due to electrostatic force. (b) CF growth is facilitated once stable nuclei are formed, because the conducting nuclei enhance the local electric field, further enhancing the thermochemical reaction. (c–d) In a NiO-based cell, a similar reaction occurs, but the CF grows in the opposite direction since holes are the majority carriers in NiO. Reprinted with permission from Reference 27. ©2011, IOP Science.

Figure 2

Figure 3. Schematic diagrams showing the sequence of forming an hourglass-like conducting filament (a) in single-layer TiO2 and (b) in a stacked cell comprised of an n-type TiO2 and a p-type NiO layer. Reprinted with permission from Reference 27. ©2011, IOP Science.

Figure 3

Figure 4. Schematic of the forming step and subsequent bipolar reversible switching. The inset shows the device structure and the corresponding band diagram. Note: TE, top electrode; BE, bottom electrode.

Figure 4

Figure 5. Fifty consecutive bipolar switching loops for a (a) 50 × 50 nm2 nanodevice and a (b) 5 × 5 μm2 micro-device. The device stack is Si/SiO2/Ti/Pt/TiO2/Pt. The I-V curves for the ON state are conductive (green curves) and symmetric, while those for the OFF state are rectifying (purple curves), suggesting the role of the metal/oxide interface in switching. The insets are the atomic force microscopy images of the cross-point devices.