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Finite element modeling and simulations on indentation and scratch tests on thin films: effects of prestress

Published online by Cambridge University Press:  09 May 2019

Biao Feng
Affiliation:
Theoretical Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA
Zhen Liu*
Affiliation:
Theoretical Division, Los Alamos National Laboratory, Los Alamos, NM 87545, USA
*
Address all correspondence to Zhen Liu at hit_lz@lanl.gov

Abstract

Indentation and scratch models are proposed to numerically investigate effects of compressive prestress on film's mechanical responses. In indentation, normal stress distributions are strongly dependent on film thickness; the applied force and the maximum normal stresses with a prestress are much larger than without prestress. For various film thicknesses the change in the normal force in scratch between the non-prestressed and prestressed films is 4%–23%. The scratch friction coefficient is larger with prestress than without prestress. With biaxial or uniaxial prestress the material becomes more difficult to deform or to slide at the contact surface compared with cases without prestress.

Information

Type
Research Letters
Copyright
Copyright © Materials Research Society 2019 
Figure 0

Figure 1. Distribution of the normal stress σzzin the thin films at the indentation depth of 0.1 µm. (a) The mesh distribution in half a film, and the green box region in (a) is the same region as (b). (b), (d), and (f) With prestress σxx = −σy 1, and (c), (e), and (g) do not have prestress applied. The film thickness is 3 µm (b, c), 6 µm (d, e), and 18 µm (f, g), respectively. (h) Schematic of the scratch process on a prestressed film coated on a substrate.

Figure 1

Figure 2. Distributions of the normal stress σyy(a, b) and σxx (c, d) of the thin films in the indentation test. (a) and (c) have the prestress σxx = −σy 1, and (b) and (d) are without prestress applied. The thickness of the films is 3, 6, and 18 µm.

Figure 2

Figure 3. (a) Indentation force Fn applied on the indenter along the y-axis versus the film thickness for prestressed (σxx = −σy 1) and non-prestressed films in the indentation test. Normal force Fn (b) and transverse force Ft (c) applied on the indenter for the scratch distance 100 µm for prestressed (σxx = −σy 1) and non-prestressed films at the scratch depth of 0.1 µm. (d) The scratch friction coefficient μs :μs = Ft/Fn.

Figure 3

Figure 4. Normal Fn (a) and transverse Ft (b) force applied on the indenter when the scratch distance is 100 µm and scratch depth is 0.1 µm for prestressed σxx = −σy 1 and prestressed σzz varying from 0 to $\sigma _{y 1}{\kern 1pt} \;(compressive)$. In (a) the normal force Fn for the indentation test is also plotted. This film thickness is 18  µm.