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On-chip spiral inductor in flip-chip technology

Published online by Cambridge University Press:  28 January 2010

Gye-An Lee*
Affiliation:
Skyworks Solutions, Inc., 5110 North River Blvd NE, Cedar Rapids, IA 52411, USA.
Darioush Agahi
Affiliation:
Skyworks Solutions, Inc., 5110 North River Blvd NE, Cedar Rapids, IA 52411, USA.
Franco De Flaviis
Affiliation:
Electrical Engineering and Computer Science, University of California, Irvine, CA 92697, USA.
*
Corresponding author: G.-A. Lee Email: gyean.lee@skyworksinc.com
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Abstract

Performance comparison is made between on-chip spiral inductor in flip-chip versus wirebond package technology. Full-wave electromagnetic simulation and on-strip measurement techniques were used to study the performance fluctuations of inductor within flip-chip environment. Results show that the performance of a flipped silicon-based spiral inductor is affected by the radio frequency (RF) current return path differences. The RF current return path for flip-chip is concentrated on the surface of silicon layer exclusively because back side ground under silicon is floating in flip-chip technology. In addition, the bump proximity effect is also considered. On-chip inductors in flip-chip environment must be optimized by reducing the eddy current in the silicon substrate and parasitic affects by adjusting design parameters. The equivalent circuit model of the flipped on-chip spiral inductor is verified with measured results over broadband frequencies. Also, the RF flip-chip characterization technique using on-strip measurement method is presented.

Information

Type
Original Article
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2010
Figure 0

Fig. 1. Cross-sectional view of spiral inductor in (a) wirebond and (b) flip-chip technology.

Figure 1

Fig. 2. Measured (a) inductance and (b) quality factor of wirebond and flip-chip inductor.

Figure 2

Fig. 3. On-strip measurement structure.

Figure 3

Fig. 4. (a) Simplified geometry and (b) simulated S-parameters of chip-to-package transition.

Figure 4

Fig. 5. Fabricated (a) chip-to-package transition and (b) on-chip spiral inductor.

Figure 5

Fig. 6. Measured S-parameters of on-chip spiral inductor with on-strip measurement structure.

Figure 6

Fig. 7. Equivalent circuit for on-strip measurement structure.

Figure 7

Fig. 8. Simplified chip-to-package transition for de-embedding application.

Figure 8

Fig. 9. (a) Simplified two-port network and (b) the equivalent circuit for inductor.

Figure 9

Table 1. Comparison of inductor characteristics for different package environment at 2 GHz.

Figure 10

Fig. 10. Equivalent circuit models for spiral inductor on (a) wirebond and (b) flip-chip.

Figure 11

Fig. 11. Equivalent circuit models for spiral inductor on (a) wirebond and (b) flipped structure.

Figure 12

Fig. 12. Fabricated RFIC with (a) flip-chip and (b) wirebond technology.

Figure 13

Fig. 13. Three-port structure for (a) electromagnetic simulation and (b) on-strip measurement.

Figure 14

Fig. 14. Simulated S-parameters for bump proximity effects.

Figure 15

Fig. 15. Measured (a) inductance and (b) quality factor with bump proximity effect.