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Pulsed laser dewetting of Au films: Experiments and modeling of nanoscale behavior

Published online by Cambridge University Press:  14 May 2013

Sagar Yadavali
Affiliation:
Department of Chemical and Biomolecular Engineering, University of Tennessee, Knoxville, Tennessee 37996
Mikhail Khenner
Affiliation:
Department of Mathematics, Western Kentucky University, Bowling Green, Kentucky 42101
Ramki Kalyanaraman*
Affiliation:
Department of Chemical and Biomolecular Engineering, University of Tennessee, Knoxville, Tennessee 37996; Department of Material Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996; andSustainable Energy Education and Research Center, University of Tennessee, Knoxville, Tennessee 37996
*
a)Address all correspondence to this author. e-mail: ramki@utk.edu

Abstract

Ultrathin metal film dewetting continues to grow in interest as a simple means to make nanostructures with well-defined properties. Here, we explored the quantitative thickness-dependent dewetting behavior of Au films under nanosecond (ns) pulsed laser melting on glass substrates. The trend in particle spacing and diameter in the thickness range of 3–16 nm was consistent with predictions of the classical spinodal dewetting theory. The early stage dewetting morphology of Au changed from bicontinuous-type to hole-like at a thickness between 8.5 and 10 nm, and computational modeling of nonlinear dewetting dynamics also captured the bicontinuous morphology and its evolution quite well. The thermal gradient forces were found to be significantly weaker than dispersive forces in Au due to its large effective Hamaker coefficient. This also resulted in Au dewetting length scales being significantly smaller than those of other metals such as Ag and Co.

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Articles
Copyright
Copyright © Materials Research Society 2013 
Figure 0

FIG. 1. (a–c) SEM images of progression of dewetting in 12-nm thick film with increasing number of laser pulses n (10, 200, and 10,500). (d) Plot of the RDF for each stage of dewetting with Gaussian peak fitting. The peak position in the RDF was used to estimate the characteristic length scales. (e) Size distribution and average diameter of nanoparticles from the SEM image of (c). (f) Analysis of the various length scales in the final robust nanoparticle state as a function of film thickness. The fits show the exponent in good agreement predictions from linear thin film hydrodynamic theory.

Figure 1

TABLE I. Effective Hamaker coefficients Aeff of various metals estimated from h2 behavior of experimentally measured dewetting length scales. Theoretical values obtained from Ref. 39 are also shown. For iron, the A value was estimated from length scales versus film thickness data reported in Ref. 12. The experimentally determined transition thickness and range of correlation lengths are also shown.

Figure 2

TABLE II. Materials values of Au used in thermal simulation, with the thermal values for substrate taken from.21,36

Figure 3

FIG. 2. (a)–(e) SEM images of the early stage dewetting morphologies following irradiation by 10 laser pulses. The film thickness from (a) to (e) corresponds to 3, 4.5, 8.5, 10, 16 nm, respectively. Also shown in the inset of each figure is the FFT of the contrast correlations of the SEM images. The annular spectrum indicates that a well-defined length scale characterizes each pattern. (f) Plot of the free energy curvature versus film thickness using equations in Ref. 13. The transition thickness hT corresponds to the minimum in the curvature and occurs at hT ∼ 9 nm.

Figure 4

FIG. 3. Thermal behavior of the Au film on SiO2/Si irradiated by a pulsed laser (a) laser energy density threshold for melting Em of Au films on SiO2. Comparison of experimental measurements (closed symbols) with calculations (open symbols) using COMSOL multiphysics.36 (b) Time dependent temperature for different Au film thicknesses at a fixed value of the laser energy density. (c) Theoretical estimates for the thermal gradients along the film vacuum interface following pulsed laser melting of Au films using a laser energy density of 70 mJ/cm2. Data for Co and Ag films are also shown and were taken from Refs. 14 and 44. (d) Thickness dependent magnitude of Au dispersion forces (Au–H) compared to thermocapillary forces (Au–Th) from the modeling results. (e) Thickness dependent magnitude of Co dispersion forces (Co–H) compared to thermocapillary forces (Co–Th) from the modeling results.14 (f) Comparison of experimentally measured dewetting length scales of Au (this work), Co16 and Ag.13 The trend line equations are Au (λ = 2.43 × h1.98), Ag (λ = 5.53 × h1.97), and for Co in the spinodal regime and without thermal gradients is (λ = 25.7 × h1.98) while the thermal gradient effect was estimated from the energy transfer model mentioned in Ref. 44.

Figure 5

FIG. 4. Three-dimensional modeling of the dewetting dynamics of a 5 nm Au film. (a) Contour plot of the height of Au film at 560 ns compared to the SEM image of the film after 10 pulses. (b) Contour plot after 640 ns compared to the SEM image after 200 pulses. (c) Contour and 3D plot after 1200 ns compared to the SEM image of nanoparticles after 10,500 pulses. The simulations were done with Hamaker coefficient A = 1.4 × 10−18 J. Note the different scales in the modeling and experimental SEM figures.