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Effect of permanent magnets on plasma confinement and ion beam properties in a double layer helicon plasma source

Published online by Cambridge University Press:  26 June 2019

Erik Varberg*
Affiliation:
Department of Physics and Technology, UiT The Arctic University of Norway, 9019, Tromsø, Norway
Åshild Fredriksen
Affiliation:
Department of Physics and Technology, UiT The Arctic University of Norway, 9019, Tromsø, Norway
*
†Email address for correspondence: erik.varberg@outlook.com
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Abstract

The work described in this article was carried out to investigate how permanent magnets (PM) affect the plasma confinement and ion beam properties in an inductively coupled plasma which expands from a helicon source. The cylindrical plasma device Njord has a 13 cm long and 20 cm wide stainless steel port connecting the source chamber and the diffusion chamber. The source chamber has an axial magnetic field produced by two coils, with magnetic field lines expanding into the diffusion chamber. Simulations have shown that the field lines leaving the edge of the source hit the port wall, causing a loss of electrons in this section. In the experiments performed in this work, PMs were added around the port walls near the exit of a plasma source and the effect was investigated experimentally by means of a retarding field energy analyser probe. The plasma potential, ion density and ion beam parameters were estimated, and the results with and without the PMs were compared. The results showed that the plasma density in the centre can in some cases be doubled, and the density at the edges of the plasma increased significantly with PMs in place. Although the plasma potential was slightly affected, and the beam velocity dropped by ${\sim}$10 %, the ion beam flux increased by a factor of 1.5.

Information

Type
Research Article
Copyright
© Cambridge University Press 2019 
Figure 0

Figure 1. (a) An overview of the Njord device and its dimensions and (b) a simulation of the axial magnetic field strength induced by the coils at different radial values at coil current $I_{\text{Coils}}=5$  A, which includes the centre, the outer radius of the Pyrex tube ($r=6.9$  cm), the inlet chamber ($r=10.5$  cm) and at the position of the coils ($r=12.4$  cm).

Figure 1

Figure 2. (a) The magnetic cusp band installed on Njord, (b) the magnetic field configuration in axial direction at $I_{\text{Coils}}=5$  A on each coil with the PMs on at (i) the centre of Njord ($r=0$  cm), (ii) the outer radius of the Pyrex tube ($r=6.9$  cm) and (iii) at the inner wall of the inlet port ($r=10.5$  cm) and (c) graph of the fitted exponential decaying magnetic field directly on the PMs at $z=37$  cm, where $r=0$  cm is on the cylindrical axis. Reference point of $B_{0}$ is at $r=11.5$  cm.

Figure 2

Figure 3. (a) Field lines calculated from the total field strength without the PMs and (b) with the PMs.

Figure 3

Figure 4. Overview of the biased grid configuration used in Njord.

Figure 4

Figure 5. (a) Raw data from the collected current $I_{C}$ and (b) raw versus filtered distribution function for an ion beam and background plasma at 400 W, $P=0.65~\unicode[STIX]{x03BC}$Bar and $I_{\text{Coils}}=5$  A, without PMs.

Figure 5

Figure 6. (a) Collected current $I_{C}$ and (b) unfiltered and filtered distribution functions for an ion beam at RF-power 400 W, pressure $P=0.65~\unicode[STIX]{x03BC}$Bar and coil current $I_{\text{Coils}}=5$  A, with and without PMs.

Figure 6

Figure 7. (a) Distribution function for a background plasma and (b) with an ion beam.

Figure 7

Figure 8. Radial profiles of (a) the plasma potential $V_{p}$, (b) the ion density $n_{i}$ and (c) ion density ratio $n_{r}$ versus RF-power at pressure $P=0.65~\unicode[STIX]{x03BC}$Bar and magnetic coil current $I_{\text{Coils}}=5$  A at RF-power 400 and 800 W, with and without the magnet band.

Figure 8

Figure 9. Centre density ratio $n_{r}$ versus RF-power at pressure $P=0.65~\unicode[STIX]{x03BC}$Bar and magnetic coil current $I_{\text{Coils}}=5$  A at RF-power range $[100{-}800]$  W.

Figure 9

Figure 10. Radial ion density ratio versus pressure values $P=0.65~\unicode[STIX]{x03BC}$Bar at flow $Q=2.0$ SCCM, $P=0.85~\unicode[STIX]{x03BC}$Bar at flow $Q=3.0$ SCCM and $P=1.05~\unicode[STIX]{x03BC}$Bar at flow $Q=4.0$ SCCM at RF-power 400 W and magnetic coil current $I_{\text{Coils}}=5$  A.

Figure 10

Figure 11. Radial ion density ratio $n_{r}$ versus magnetic coil current $I_{\text{Coils}}$ values at 0 and 5 A at RF-power $=400$  W and pressure $P=0.85~\unicode[STIX]{x03BC}$Bar with and without PMs.

Figure 11

Figure 12. Centre ion density $n_{i}$ and ion density ratio $n_{r}$ versus magnetic coil current $I_{\text{Coils}}$ at RF-power $=400$  W and pressure $P=0.85~\unicode[STIX]{x03BC}$Bar.

Figure 12

Figure 13. Centre ion beam velocity ratio $v_{Br}$ and ion beam flux ratio $\unicode[STIX]{x1D719}_{Br}$ versus RF-power at pressure $P=0.65~\unicode[STIX]{x03BC}$Bar and magnetic coil current $I_{\text{Coils}}=5$  A.

Figure 13

Table 1. Estimated values for the ion beam velocity ratio $v_{Br}$, ion beam density ratio $n_{Br}$ and flux ratio $\unicode[STIX]{x1D719}_{r}$ at different flows $Q$ and magnetic coil currents $I_{\text{Coils}}$ at RF-power 400 W, for which a beam is present.