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New epitaxy paradigm in epitaxial self-assembled oxide vertically aligned nanocomposite thin films

Published online by Cambridge University Press:  24 July 2017

Jijie Huang
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA
Judith L. MacManus-Driscoll
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Cambridge CB3 OFS, U.K.
Haiyan Wang*
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA; and School of Electrical and Computer Engineering, West Lafayette, Indiana 47907, USA
*
a) Address all correspondence to this author. e-mail: hwang00@purdue.edu

Abstract

Self-assembled oxide-based vertically aligned nanocomposite (VAN) thin films have aroused tremendous research interest in the past decade. The interest arises from the range of unique nanostructured films which can form and the multifunctionality arising from these forms. Hence, a large number of oxide VAN systems have been demonstrated and explored for enhancing specific physical properties, such as strain-enhanced ferroelectricity, tunable magnetotransport, and novel electrical/ionic transport properties. The epitaxial growth of the nanocomposite thin films and the coupling at the heterogeneous interfaces are critical considerations for future device applications. In this review, the advantages of strain coupling along vertical interfaces and film-substrate interfaces in nanocomposite films over conventional single phase films are discussed. Specifically, a unique strain compensation model enabling the epitaxial growth of two-phase nanocomposites having large lattice mismatch with substrates is proposed. Out-of-plane strain coupling between the two phases is also discussed in terms of designing strain states for desired functionalities.

Information

Type
Invited Reviews
Copyright
Copyright © Materials Research Society 2017 
Figure 0

FIG. 1. High-resolution TEM image of (a) SDC plain film and (b) vertical SDC–STO interfaces in cross-sectional view. Scale bar, 10 nm. (c) Out-of-plane epitaxial relationship investigation in θ–2θ scan using X-ray diffraction. (d) RSM about the (203) STO substrate for a plain SDC film (left) and a SDC–STO nanoscaffold film (right) (Ref. 53).

Figure 1

FIG. 2. (a) A single-phase film shows lattice misfit induced strain at the film–substrate interface; (b) VAN film shows lattice misfit-induced strain at the pillar–substrate interface; (c) in-plane lattice constants (left axis: phase A; right axis: phase B) as a function of composition ratio for phase A. The slanted dashed lines connecting phase A and phase B demonstrate the tuned range of in-plane lattice constant for each particular VAN system, which can be used for selecting suitable substrates. The straight solid lines represent in-plane lattice constants of the most popular substrates (MgO, STO, and LAO). The composition acronyms correspond to compositions shown in the left or right hand axes.

Figure 2

FIG. 3. (a) Cross-section STEM image showing the alternating growth of LSMO (white) and MgO vertical nanoscaffolds (dark) on STO (001) substrates. Inset: plan-view STEM image of the LSMO:MgO film; (b) high-resolution STEM image showing the vertical MgO nanoscaffolds in LSMO phase; (c) zoomed-in yellow box area in (b) showing the film-substrate interface; (d) high-resolution STEM image showing the vertical interface between the MgO and LSMO phase (Ref. 64).

Figure 3

FIG. 4. XRD θ–2θ scan of the for BTO–CeO2 films grown on STO. The inset shows the φ scan of the BTO (110) plane relative to the STO (110) plane and the CeO2 (111) plane relative to the STO (111) plane (Ref. 65).

Figure 4

FIG. 5. (a) Crystal structure of hexagonal ZnO. (b) In-plane matching between ZnO, LSMO, and STO lattice. (c) Atomic arrangement of in-plane lattice matchings (Ref. 75).

Figure 5

FIG. 6. (a) VAN systems with lattice misfit induced strain along the phase A-phase B vertical interface. Note the pillar phase is typically the minority phase; (b) out-of-plane 1:1 lattice epitaxial matching and n:m domain matching epitaxial (DME) matching for reported VAN systems. Here, the underlined systems are known DME systems and the nonunderlined ones are assumed to be LME ones, although it is possible that for several of these systems there are DME, but the type of epitaxy has simply not been experimentally studied. For the known DME cases, the lattice parameters are determined by matching integral numbers of lattices, e.g., for 7 LSMO (001):5 CeO2 (001), the reduced matching relation is LSMO (001):5/7 CeO2 (001), thus the plotted matching distance for dLSMO is 3.9 Å (d1), while the plotted matching distance ${d_{{\rm{Ce}}{{\rm{O}}_2}}}$ = 5.41 Å × 5/7 = 3.86 Å (d2).

Figure 6

FIG. 7. (a) Cross-sectional TEM image of a LSMO0.75BFO0.25 (L0.75B0.25) VAN film showing a BFO pillar embedded in a LSMO matrix. The inset shows the corresponding top-view AFM image. (b) High-resolution STEM image of the vertical heterointerface between LSMO and BFO. (c) Enlarged view of the atomic lattice across the heterointerface. The intensity line profile is inserted along the marked rectangular region. (d) FFT image of (c) showing the coherent one-to-one lattice matching without any dislocations. (e) Corresponding SAED pattern showing the high epitaxial quality of a L0.75B0.25 film. (f) High-resolution STEM image of the heterointerface in a L0.33B0.67 film, showing increased interface roughness. The inset shows the FFT image of the marked region identifying dislocations. (g) Crystallographic model of the L1−xBx VAN films (Ref. 32).

Figure 7

FIG. 8. (a) High-resolution HAADF image of vertical interface of SrTiO3 matrix and Sm2O3 nanocolumn in cross-sectional-view; (b) crystallographic modeling of vertical interface between SrTiO3 and Sm2O3 (Ref. 72); (c) atomic arrangement of out-of-plane lattice matching between LSMO (002) planes and ZnO $\left( {11\bar 20} \right)$ planes in the STO $\left[ {1\bar 10} \right]$ zone axis (Ref. 75).