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Convolutional neural networks for grazing incidence x-ray scattering patterns: thin film structure identification

Published online by Cambridge University Press:  15 March 2019

Shuai Liu
Affiliation:
University of California, Berkeley, CA 94720, USA
Charles N. Melton
Affiliation:
Lawrence Berkeley National Laboratory, 1 Cyclotron Rd. Berkeley, CA 94720, USA
Singanallur Venkatakrishnan
Affiliation:
Oak Ridge National Laboratory, Oakridge, TN 37830, USA
Ronald J. Pandolfi
Affiliation:
Lawrence Berkeley National Laboratory, 1 Cyclotron Rd. Berkeley, CA 94720, USA
Guillaume Freychet
Affiliation:
Lawrence Berkeley National Laboratory, 1 Cyclotron Rd. Berkeley, CA 94720, USA
Dinesh Kumar
Affiliation:
Lawrence Berkeley National Laboratory, 1 Cyclotron Rd. Berkeley, CA 94720, USA
Haoran Tang
Affiliation:
University of California, Berkeley, CA 94720, USA
Alexander Hexemer
Affiliation:
Lawrence Berkeley National Laboratory, 1 Cyclotron Rd. Berkeley, CA 94720, USA
Daniela M. Ushizima*
Affiliation:
University of California, Berkeley, CA 94720, USA Lawrence Berkeley National Laboratory, 1 Cyclotron Rd. Berkeley, CA 94720, USA
*
Address all correspondence to Daniela M. Ushizima at dushizima@lbl.gov

Abstract

Nano-structured thin films have a variety of applications from waveguides, gaseous sensors to piezoelectric devices. Grazing Incidence Small Angle x-ray Scattering images enable classification of such materials. One challenge is to determine structure information from scattering patterns alone. This paper highlights the design of multiple Convolutional Neural Networks (CNN) to classify nanoparticle orientation in a thin film by learning scattering patterns. The network was trained on several thin films with a success rate of 94%. We demonstrate CNN robustness under different noises as well as demonstrate the potential of our proposed approach as a strategy to decrease scattering pattern analysis time.

Information

Type
Artificial Intelligence Research Letters
Copyright
Copyright © Materials Research Society 2019 
Figure 0

Figure 1. Diagram of experimental setup used in HipGISAXS. The incoming x-ray hits the substrate and scatters off the surface, hitting the detector. The collected image is a reciprocal space representation of the material. This diffraction pattern is simulated in HipGISAXS.

Figure 1

Table I. Unit cells and orientations of crystals used in HipGISAXS simulations

Figure 2

Figure 2. Confusion matrix for the trained AlexNet CNN. The confusion matrix highlights the high accuracy of the predictions as shown by the yellow diagonal. The matrix also shows the confusion that exists in classifying Simple Cubic 110 and Body-Centered Cubic 110.

Figure 3

Figure 3. PCA of the final fully connected layer of the AlexNet CNN. PCA shows that there is a clear distinction in the classified 111 unit cells compared with the 100 and 110. We also see the overlap of the Simple Cubic 110 and BCC 110 as was seen in the confusion matrix.

Figure 4

Figure 4. BCC 110 scattering pattern subjected to various noises. (a) Clean data, (b) the data subjected to smear, (c) Gaussian nose, and (d) the data subjected to a lower resolution.

Figure 5

Table II. Noise levels and training/prediction accuracies of the trained AlexNet CNNs

Figure 6

Table III. CNN prediction accuracy as a function of image resolution

Figure 7

Figure 5. Effect on a given scattering pattern when the repetition value of the unit cell is changed. Figure (a) shows the limiting case of one unit cell, (b) shows 10 unit cells, (c) shows 100 unit cells, and (d) shows 200 unit cells. We note that the features become more defined as the number of unit cells increase.

Figure 8

Figure 6. CNN prediction accuracy as a function of repeating units in both the x and y directions. The CNN is able to reliably predict the underlying unit cell composing the thin film when there are less than 10 unit cells. This highlights extremely sharp features are not necessarily needed for a reliable prediction by the CNN.

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