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A deep learning-based approach to extraction of filler morphology in SEM images with the application of automated quality inspection

Published online by Cambridge University Press:  18 March 2022

Md. Fashiar Rahman
Affiliation:
Department of Industrial, Manufacturing and Systems Engineering, The University of Texas at El Paso, TX 79968, USA
Tzu-Liang (Bill) Tseng
Affiliation:
Department of Industrial, Manufacturing and Systems Engineering, The University of Texas, El Paso, TX 79968, USA
Jianguo Wu*
Affiliation:
College of Engineering, Industrial and Systems Engineering, Peking University, Beijing 100871, China
Yuxin Wen
Affiliation:
Department of Electrical and Computer Science, Chapman University, Orange, CA 92866, USA
Yirong Lin
Affiliation:
Department of Mechanical Engineering, The University of Texas, El Paso, TX 79968, USA
*
Author for correspondence: Jianguo Wu, E-mail: j.wu@pku.edu.cn
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Abstract

Automatic extraction of filler morphology (size, orientation, and spatial distribution) in Scanning Electron Microscopic (SEM) images is essential in many applications such as automatic quality inspection in composite manufacturing. Extraction of filler morphology greatly depends on accurate segmentation of fillers (fibers and particles), which is a challenging task due to the overlap of fibers and particles and their obscure presence in SEM images. Convolution Neural Networks (CNNs) have been shown to be very effective at object recognition in digital images. This paper proposes an automatic filler detection system in SEM images, utilizing a Mask Region-based CNN architecture. The proposed system can simultaneously classify, detect, and segment fillers in SEM images, making it suitable for morphology analysis of fillers and automatic quality inspection. We also propose a novel SEM image simulation procedure to overcome the data scarcity for training a deep CNN architecture. The proposed filler detection system is trained on the simulated images. It is shown that the trained network can detect and segment fillers with higher accuracy even in the overlapping and obscure situations. The performance and robustness of the proposed system are evaluated using both simulated and real microscopic images.

Information

Type
Research Article
Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press
Figure 0

Fig. 1. Illustration of the challenges in fiber and particle identification and segmentation (a) and (b) fibers and particles are overlapped with each other; (c) the presence of fibers and particles in the SEM images is vague due to poor contrast.

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Fig. 2. The deep learning architecture for detection, classification, and segmentation of fibers and particles.

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Fig. 3. Feature extraction from the different layers of VGG-16 network.

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Fig. 4. Illustration of anchor boxes used for any specific position in the feature map.

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Fig. 5. Region-based detector and segmentation network.

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Fig. 6. (a) Fiber generation and (b) particle generation.

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Fig. 7. (a) Artificial SEM image and (b) mask (ground truth) of the image.

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Table 1. Ground truth and annotation file generation procedure

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Fig. 8. Result of the loss function (a) classification and box regression loss for RPN and (b) classification and box regression loss for region-based detector and mask loss for segmentation network.

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Fig. 9. Detection and segmentation of fibers and particles; column (a) simulated SEM images; column (b) detection, classification, and segmentation results; column (c) ground truth of corresponding SEM images in column (a).

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Fig. 10. Example of filler detection and segmentation for overlapped particles and fibers.

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Fig. 11. Example of some misdetection and segmentation error.

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Table 2. Performance metrics of filler detection system

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Table 3. Comparison of performance of fillers detection and segmentation

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Table 4. The averaged execution time per image

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Fig. 12. Filler segmentation with bounding box (a) fiber and (b) particle.

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Fig. 13. Fiber morphology (a) length distribution and (b) orientation distribution.

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Fig. 14. Particle morphology (a) height distribution and (b) width distribution.

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Fig. 15. Demonstration of spatial homogeneity.

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Fig. 16. Detection and segmentation of fibers and particles. The first row: real SEM images; the second row: detection, classification, and segmentation results of corresponding image in the first row.