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Materials for spin-transfer-torque magnetoresistive random-access memory

Published online by Cambridge University Press:  10 May 2018

Shinji Yuasa
Affiliation:
National Institute of Advanced Industrial Science and Technology, Spintronics Research Center, Japan; yuasa-s@aist.go.jp
Kazuhiro Hono
Affiliation:
Research Center for Magnetic and Spintronic Materials, National Institute for Materials Science, Japan; kazuhiro.hono@nims.go.jp
Guohan Hu
Affiliation:
IBM T.J. Watson Research Center, USA; hug@us.ibm.com
Daniel C. Worledge
Affiliation:
IBM T.J. Watson Research Center, USA; worledge@us.ibm.com

Abstract

Spin-transfer-torque magnetoresistive random-access memory (STT-MRAM) is an emerging nonvolatile memory that uses magnetic tunnel junctions (MTJs) to store information. MTJs with a crystalline MgO(001) tunnel barrier sandwiched between ferromagnetic layers, such as CoFeB, exhibit giant tunnel magnetoresistance, which is used to readout the STT-MRAM. Writing of STT-MRAM is based on current-induced magnetization reversal, called STT switching. STT-MRAM with perpendicular magnetization is especially important for high-density and low-power-consuming memory applications such as embedded memory for large-scale integrated circuit. For STT-MRAM to replace ultrahigh-density dynamic random-access memory, however, there are still technological challenges concerning the materials and fabrication processes of MTJs. This article reviews the physics and materials science of MTJs for STT-MRAM. We also discuss the importance of new MTJ materials and processes for next-generation ultrahigh-density MRAM.

Information

Type
Materials for Advanced Semiconductor Memories
Copyright
Copyright © Materials Research Society 2018 
Figure 0

Figure 1. (a) Schematic illustrations of the tunnel magnetoresistance effect in a magnetic tunnel junction (MTJ) (left panels: parallel magnetic state, right panels: antiparallel magnetic state). D↑ and D↓ denote density of states for majority-spin and minority-spin bands, respectively. Thick black arrows represent direction of magnetization or electron spin. Dotted red arrows illustrate tunneling transport of electrons. (b) Cross section of a practical MTJ with in-plane magnetization. (c) A memory cell of magnetoresistive random-access memory. Note: EF, Fermi energy; SAF, synthetic antiferromagnet; MOSFET, metal oxide semiconductor field-effect transistor; AF, antiferromagnetic; RP, resistance for the parallel magnetic state; RAP, resistance for the antiparallel magnetic state; word line, a metal line to select one column of transistors to make them conducting; bit line, a metal line to apply voltage across one row of the MTJ array. Only the MTJ at the intersection of the selected column and row receives the applied voltage, which is then used to read or write the bit.

Figure 1

Figure 2. Schematic of electron tunneling through (a) an amorphous Al-O barrier and (b) a crystalline MgO(001) barrier. Δ1, Δ5, and Δ2 denote wave functions of conduction electrons with specific orbital symmetries. Thick vertical arrows illustrate transport of tunneling electrons. Cross-sectional transmission electron microscope images of (c) Fe/Al-O/Fe-Co magnetic tunnel junction (MTJ) and (d) epitaxial Fe(001)/MgO(001)/Fe(001) MTJ. (e) History of the magnetoresistance ratio (MR) ratio at room temperature (RT) in MTJs. Crystalline tunnel barrier materials are essential for attaining MR ratios substantially higher than 100%.

Figure 2

Figure 3. Cross-sectional transmission electron microscope (TEM) images of CoFeB/MgO/CoFeB magnetic tunnel junction (MTJ) (a) in as-grown state and (b) after annealing. (c) Cross-sectional TEM image of CoFeB/MgO/CoFeB MTJ with a practical synthetic antiferromagnetic reference layer structure underneath the MTJ part. Stacking structure of MTJ film is (substrate)/Ta/PtMn/CoFe/Ru/CoFeB/MgO/CoFeB/Ta/Ru/. Photo courtesy of Canon-Anelva Corporation.

Figure 3

Figure 4. (a) Schematic of a spin-transfer-torque magnetoresistive random-access memory bit cell. (b) Cross-sectional transmission electron microscope image of a 20-nm dia. perpendicular magnetic tunnel junction (p-MTJ). Photo courtesy of IBM.

Figure 4

Figure 5. (Upper panels) Cross-sectional scanning transmission electron microscope images and (lower panels) their outlined images using fast Fourier transform filtering of epitaxial Fe/tunnel barrier/Fe(001) magnetic tunnel junctions: (a) MgO(001) barrier, and (b) MgAl2O4(001) barrier.35 ⊥ marks indicate edge dislocations.