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Highly self-assembled nanotubular aluminum oxide by hard anodization

Published online by Cambridge University Press:  01 January 2011

Kunbae Noh
Affiliation:
Materials Science and Engineering, University of California, San Diego, La Jolla, California 92093
Karla S. Brammer
Affiliation:
Materials Science and Engineering, University of California, San Diego, La Jolla, California 92093
Hyunsu Kim
Affiliation:
Materials Science and Engineering, University of California, San Diego, La Jolla, California 92093
Se-Yeon Jung
Affiliation:
Department of Materials Science and Engineering, Korea University, Seoul, Korea
Tae-Yeon Seong
Affiliation:
Department of Materials Science and Engineering, Korea University, Seoul, Korea
Sungho Jin*
Affiliation:
Materials Science and Engineering, University of California, San Diego, La Jolla, California 92093
*
a)Address all correspondence to this author. e-mail: jin@ucsd.edu

Abstract

Anodized aluminum oxide (AAO), well-known hexagonally ordered vertical pore nanostructure, can be altered to form nanotubular AAO arrays potentially having many favorable properties due to its large surface area and unique geometry. We present here a creation of novel nanotubular AAO structure by the hard anodization technique. Because of the guided formation of void channels at triple cell junctions during the course of the controlled anodization process, periodically spaced-apart aluminum oxide nanotubular geometry could be achieved over large areas. Further separation to well-defined individual AAO nanotube arrays was obtained when etched in a mixed CuCl2/HCl solution during Al substrate removal. Nanotubular geometry AAO with periodic and mechanically robust structure can be useful not only for biomedical applications such as to enhance cell adhesion and viability or drug delivery vehicles, but also as a large-surface-area catalyst support or sensor elements.

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Copyright
Copyright © Materials Research Society 2011
Figure 0

FIG. 1.Schematic illustration of nanotubular AAO fabrication. (a) MA to form porous AAO layer in 0.3 M sulfuric acid, (b) HA to form tubular AAO layer, (c) selective aluminum removal by etching in (CuCl2 + HCl) solution, (d) attaching AAO upside down on Si substrate and pore-widening etch in 5 wt% phosphoric acid.

Figure 1

FIG. 2.Representative anodic current changes during anodization experiments. MA (black dotted line) was conducted at 25 V in 0.3 M sulfuric acid at 1 °C, and HA (red solid line) was conducted at 40V in 0.01 M sulfuric acid. MA for 30 min led to the porous AAO structure, which was used as the basis to start the subsequent HA.

Figure 2

FIG. 3.SEM images showing: (a) top view of upside down barrier layer for the porous AAO after MA with 0.3 M sulfuric acid at 25 V, (b) porous structure after the barrier layer is removed, (c) top view of upside down tubular AAO right after HA at 0.01 M sulfuric acid 40 V, (d) top view SEM after the nanotube tip is etched away and the tubular geometry is realized. The schematics for porous AAO formation mechanism are presented on the left of image (b) and the mechanism of nanotube formation is illustrated by the schematics on the right side of image (d).

Figure 3

FIG. 4.SEM image of freestanding AAO nanotubes placed onto Si substrate (after removal of Al substrate); (a) low and (b) high magnification, respectively. Some of the loose nanotubes imply a mechanical robustness as they can be bent without fracture.

Figure 4

FIG. 5.Oblique view of SEM image of vertically aligned periodic AAO nanotubes. (a) Low magnification image, (b) high magnification image showing the nanotube and hole dimension, (c) cross-sectional SEM showing the aligned nature of the AAO nanotubes and an example bent (mechanically flexible) behavior of a separated individual alumina nanotube. Highly ordered hexagonal arrangement was obtained by HA (at 40 V with 0.01 M sulfuric acid), followed by chemical etching in 5 wt% phosphoric acid.

Figure 5

FIG. 6.SEM images of vertically aligned periodic AAO nanotubes as (a) hard-anodized, tip-closed nanotube geometry, (b) after chemical etching to open the nanotube tip, and (c) after additional Cr sputter deposition to intentionally reclose the nanotube entrance. An intermediate, partially blocked nanotube structure is obtained if the sputtering time is reduced.

Figure 6

FIG. 7.Osteoblast (bone) cell viability determined by FDA (live fluorescent staining, green color) after 24 h of culture time on (a) flat Al2O3 and on (b) Al2O3 nanotubes. Clearly, the cell adhesion/spreading are significantly enhanced on the nanotube surface. (c) Oblique view SEM image of vertically aligned highly periodic AAO nanotubes for cell culture.