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High-precision small-scale laser focal spot measurements

Published online by Cambridge University Press:  06 February 2013

Z.W. Lu*
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
X.Y. Liu
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
X. Wang
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
D.X. Ba
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
Z.H. Jiang
Affiliation:
Changchun Institute of Optics, Fine mechanics and Physics, Chinese Academy of Sciences, Changchun, China
P.Y. Du
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
C.Y. Zhu
Affiliation:
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China
*
Address correspondence and reprint requests to: Z.W. Lu, National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, P. O. Box 3031, Harbin 150080, China. E-mail: zw_lu@sohu.com.

Abstract

In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 µm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

Information

Type
Research Article
Copyright
Copyright © Cambridge University Press 2013
Figure 0

Fig. 1.(a) The intensity distribution of ideal Gaussian focal spot, where coordinates x and y are positions of each spot point in units of μm, coordinate z is the energy value of the point in units of 10 mW/μm2. (b) The gray image of the ideal Gaussian focal spot.

Figure 1

Fig. 2.(a) The intensity distribution of ideal Gaussian focal spot with noise, where coordinates x and y are positions of each spot point in units of μm, coordinate z is the energy value of the point in units of 10 mW/μm2. (b) The gray image of the ideal Gaussian focal spot with noise.

Figure 2

Fig. 3.CCD scanning process.

Figure 3

Fig. 4.The small parts of subdivision.

Figure 4

Fig. 5.(a) The intensity distribution of ideal Gaussian focal spot after scanning, where coordinates x and y are positions in units of μm, coordinate z is the gray value. (b) The gray image of the ideal Gaussian focal spot after scanning.

Figure 5

Fig. 6.(a) The intensity distribution of the relatively low noise ideal Gaussian focal spot after scanning, where coordinates x and y are positions in units of μm, coordinate z is the gray value. (b) The gray image of the ideal Gaussian focal spot with the relatively low noise after scanning.

Figure 6

Fig. 7.(a)The intensity distribution of the relatively high noise ideal Gaussian focal spot after scanning, where coordinates x and y are positions in units of μm, coordinate z is the gray value. (b) The gray image of the ideal Gaussian focal spot after scanning.

Figure 7

Table 1.The centroid position of the focal spot.

Figure 8

Fig. 8.Experimental setup.

Figure 9

Fig. 9.(a) The gray image of the focal spot directly read out by the CCD, (b) The gray image of the focal spot by scanning, (c) The restored gray image of the focal spot.

Figure 10

Table 2.The gray-scale data of the original spot