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Improvement of carbon nanocoil purity achieved by supplying catalyst molecules from the vapor phase in chemical vapor deposition

Published online by Cambridge University Press:  26 September 2014

Yoshiyuki Suda*
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Yuichi Ishii
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Tatsuki Miki
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Koji Maruyama
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Hideto Tanoue
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Hirofumi Takikawa
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Hitoshi Ue
Affiliation:
Fuji Research Laboratory, Tokai Carbon Co., Ltd., Oyama, Shizuoka 410-1431, Japan
Kazuki Shimizu
Affiliation:
Development Department, Shonan Plastic Manufacturing Co., Ltd., Hiratsuka, Kanagawa 254-0807, Japan
Yoshito Umeda
Affiliation:
Toho Gas Co., Ltd., Tokai, Aichi 476-8501, Japan
*
a) Address all correspondence to this author. e-mail: suda@ee.tut.ac.jp

Abstract

We investigated how changes in the method of supplying Sn and Fe carbon nanocoil (CNC) catalysts affected the results of chemical vapor deposition. The Sn/Fe catalysts were supplied using the following four materials: a thin Sn film, a drop-coated solution of Fe2O3, tetramethyltin (TMT) vapor, and ferrocene vapor. The CNC purity was evaluated using scanning electron microscopy. The CNC purity in the overall carbon deposit was also evaluated by analyzing the cross-section of the deposit. The CNC purity averaged over the overall carbon deposit was increased 1.5-fold by the TMT supply. We obtained a maximum CNC purity of 72% using a combination of TMT and ferrocene vapors, with Sn/Fe deposition on the substrate. Energy-dispersive x-ray spectroscopy analysis of the catalyst nanoparticles in the tips of the CNCs and carbon nanofibers (CNFs) revealed that there was a large difference in the Sn/Fe molar ratios for the angular- and round-type CNFs.

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Copyright
Copyright © Materials Research Society 2014 
Figure 0

TABLE I. CVD conditions.

Figure 1

TABLE II. Catalytic vapor supply conditions.

Figure 2

FIG. 1. SEM images and illustrations of catalyst nanoparticles in CNC tips: (a) Catalyst nanoparticle A (symmetric structure), (b) B (asymmetric structure), (c) C (mirror-symmetric structure with two active facets), and (d) D (branched structure). Neither TMT nor ferrocene was used. The Sn film thickness and growth time were 40 nm and 600 s, respectively. The other growth conditions were the same as those described in Table I. The scale bar represents 500 nm. (Also see Supplementary Material.)

Figure 3

FIG. 2. Dependence of the CNC number density (open squares) and amount of carbon deposits (open triangles) on the TMT concentration in ethanol. No Sn film was deposited on the SiO2/Si substrates. The growth time was 600 s. The other growth conditions were the same as described in Tables I and II.

Figure 4

FIG. 3. (a) Photographs of the as-grown carbon deposits, and SEM micrographs of their cross-sections: (a1) with and (a2) without TMT. (b) Relationship between the Sn/Fe ratio at the cross-sectional surfaces of the carbon deposits and the height from the substrate. The TMT concentration in ethanol, Sn film thickness, and growth time were 0.2%, 40 nm, and 600 s, respectively. The other growth conditions were the same as described in Tables I and II.

Figure 5

FIG. 4. Purity of CNCs grown on the surface of carbon deposits under a supply of TMT and ferrocene. The TMT concentration in ethanol and growth time were 0.2% and 600 s, respectively. The other growth conditions were the same as described in Tables I and II.

Figure 6

FIG. 5. Initial growth of CNCs on the substrate with and without TMT, after synthesis performed for (a) 30 s and (b) 120 s. The TMT concentration in ethanol and the Sn film thickness were 0.2% and 40 nm, respectively. Ferrocene was not added. The other growth conditions were the same as described in Tables I and II.

Figure 7

FIG. 6. (a) Fe2p and (b) Sn3d XPS spectra for CNC samples grown for 30 and 120 s.

Figure 8

FIG. 7. Model for CNC growth at the initial stage, with a catalyst supply from the vapor phase.

Figure 9

FIG. 8. (a) Sn/Fe ratios of catalyst nanoparticles in CNCs and CNFs grown with or without a TMT supply. The TMT concentration in ethanol, Sn film thickness, and growth time were 0.2%, 40 nm, and 600 s, respectively. Ferrocene was not added. The other growth conditions were the same as described in Tables I and II. (b) SEM micrographs of a representative angular-type CNC, and angular- and round-type CNFs.

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Supplementary Material

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